Characterization of piezoceramic crosses with large range scanning capability and applications for low temperature scanning tunneling microscopy
作者:
J. A. Helfrich,
S. Adenwalla,
J. B. Ketterson,
G. A. Zhitomirsky,
期刊:
Review of Scientific Instruments
(AIP Available online 1995)
卷期:
Volume 66,
issue 10
页码: 4880-4884
ISSN:0034-6748
年代: 1995
DOI:10.1063/1.1146169
出版商: AIP
数据来源: AIP
摘要:
We have developed a large amplitude piezoceramic scanner which should have numerous applications. Scanning tunneling microscopy (STM) and other scanning probe microscopies predominantly use piezoceramics for the scanning elements. Similarly adaptive optics, high resolution lithography, and micromanipulators are other examples of research which regularly utilize piezoceramic scanners. We present a new geometry for a piezoceramic scanner which allows for both high resolution (∼nanometers) and large amplitude (∼400 &mgr;m) displacements. The cross‐shaped geometry makes it possible to produce extremely long pieces with very high tolerances. We have shown its effectiveness by using it as the major component of a low temperature STM (LTSTM). This LTSTM is unique in two distinct ways: the scan range at low temperature is a factor of 10 larger than those reported and the coarse, approach mechanism is a single component piezoceramic—making coarse approachinsitumuch quieter and easier than in other designs. ©1995 American Institute of Physics.
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