Microstructure of sputtered TiN on Al
作者:
D. J. Eaglesham,
J. E. Bower,
M. A. Marcus,
M. Gross,
S. Merchant,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 2
页码: 219-221
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119525
出版商: AIP
数据来源: AIP
摘要:
We use electron microscopy and x-ray diffraction to study the microstructure of TiN deposited on Al. In contrast to previous work, we show that the TiN has a large (≈1 &mgr;m) grain size arising from its epitaxial orientation on the underlying Al. Within a single grain, the TiN has a heavily voided columnar structure that closely mimics the appearance of fine grains. The within-grain columnar structure arises from the usual shadowing mechanism for sputtered films, and has a weak dependence on the deposition temperature. ©1997 American Institute of Physics.
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