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Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma

 

作者: T. Hori,   M. D. Bowden,   K. Uchino,   K. Muraoka,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 69, issue 24  

页码: 3683-3685

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.117188

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The electron energy distribution function (EEDF) in an argon planar inductively coupled plasma was measured by the method of laser Thomson scattering. In a low‐pressure discharge, a clear departure from a Maxwellian distribution function was observed; an unambiguous measurement of a non‐Maxwellian distribution in a low‐density glow discharge. The non‐Maxwellian EEDF became Maxwellian in a higher pressure discharge. These observations were attributed to the lack of randomizing collisions in the low‐pressure discharge and the increase in the number of these collisions at higher pressure. ©1996 American Institute of Physics.

 

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