Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
作者:
T. Hori,
M. D. Bowden,
K. Uchino,
K. Muraoka,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 24
页码: 3683-3685
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117188
出版商: AIP
数据来源: AIP
摘要:
The electron energy distribution function (EEDF) in an argon planar inductively coupled plasma was measured by the method of laser Thomson scattering. In a low‐pressure discharge, a clear departure from a Maxwellian distribution function was observed; an unambiguous measurement of a non‐Maxwellian distribution in a low‐density glow discharge. The non‐Maxwellian EEDF became Maxwellian in a higher pressure discharge. These observations were attributed to the lack of randomizing collisions in the low‐pressure discharge and the increase in the number of these collisions at higher pressure. ©1996 American Institute of Physics.
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