Spectrometer Shield for Stray Iron X‐Ray Radiation in the Scanning Electron Microscope
作者:
D. B. Ballard,
H. Yakowitz,
S. Siems,
期刊:
Review of Scientific Instruments
(AIP Available online 1971)
卷期:
Volume 42,
issue 1
页码: 14-15
ISSN:0034-6748
年代: 1971
DOI:10.1063/1.1684843
出版商: AIP
数据来源: AIP
摘要:
A spectrometer shield for stray iron x‐ray radiation was devised and installed in the scanning electron microscope. A modification to the touch alarm was also made to make the system operative.
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