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Spectrometer Shield for Stray Iron X‐Ray Radiation in the Scanning Electron Microscope

 

作者: D. B. Ballard,   H. Yakowitz,   S. Siems,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1971)
卷期: Volume 42, issue 1  

页码: 14-15

 

ISSN:0034-6748

 

年代: 1971

 

DOI:10.1063/1.1684843

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A spectrometer shield for stray iron x‐ray radiation was devised and installed in the scanning electron microscope. A modification to the touch alarm was also made to make the system operative.

 

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