Sheath dynamics observed in a 13.56 MHz-driven plasma
作者:
C. M. O. Mahony,
R. Al Wazzan,
W. G. Graham,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 5
页码: 608-610
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119808
出版商: AIP
数据来源: AIP
摘要:
We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. ©1997 American Institute of Physics.
点击下载:
PDF
(256KB)
返 回