首页   按字顺浏览 期刊浏览 卷期浏览 Sheath dynamics observed in a 13.56 MHz-driven plasma
Sheath dynamics observed in a 13.56 MHz-driven plasma

 

作者: C. M. O. Mahony,   R. Al Wazzan,   W. G. Graham,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 5  

页码: 608-610

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119808

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. ©1997 American Institute of Physics.

 

点击下载:  PDF (256KB)



返 回