Calculation of ion range profiles in a double layer substrate
作者:
Amitabh Jain,
Dhananjay Brahme,
Uma Jain,
期刊:
Radiation Effects
(Taylor Available online 1982)
卷期:
Volume 63,
issue 1-4
页码: 55-59
ISSN:0033-7579
年代: 1982
DOI:10.1080/00337578208222825
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A method is proposed for the calculation of the range profile of ions implanted into a double layer substrate. Results of calculation for the case of boron implantation into silicon through silicon dioxide are presented. In the present method one first considers the situation obtaining if the silicon beneath the interface were replaced by oxide. The profile is then known from standard data. A computer program then optimizes summation of Gaussians to obtain the energy distribution of equivalent ions normally incident at the interface. This distribution is then used to calculate the range profile in the real case of silicon beneath the interface again using standard data. The assumption in this is that the energy distribution of equivalent ions normally incident at the interface is independent of the underlying material.
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