An automatic field‐emission tip conditioning system
作者:
Shengyang Ruan,
Oscar H. Kapp,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 9
页码: 4056-4060
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143211
出版商: AIP
数据来源: AIP
摘要:
An automatic system has been completed for conditioning cold field‐emission tips to obtain high flux density and low‐noise emission. It was designed as a real‐time control and operating system for the electron source of a new sextupole‐corrected scanning transmission electron microscope and is able to condition the tipinsitu. All of the control devices in this system are interfaced to a computer and communication across the electric field created by the 200‐kV acceleration voltage is accomplished with light pipes. A program, written in Pascal, controls the conditioning process. This system has been utilized to experimentally determine the optimal flash level for a newly fabricated tip as well as performing corrective maintenance to the conditioned tip to extend its maximum useful lifetime.
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