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Chamber material effects on actinometric measurements in rf glow discharges

 

作者: Tina J. Cotler,   Michael L. Passow,   Jeffrey P. Fournier,   Mary L. Brake,   Michael E. Elta,  

 

期刊: Journal of Applied Physics  （AIP Available online 1991）
卷期: Volume 69, issue 5  

页码: 2885-2888

 

ISSN:0021-8979

 

年代: 1991

 

DOI:10.1063/1.348597

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The relative concentration of atomic fluroine was measured in a CF4rf glow discharge using the actinometric technique. The dependence of fluorine concentration on power, pressure and flow are presented and shown to be dependent upon reactor wall material and electrode material.

 

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