Study of solid surfaces by metastable electron emission microscopy: Energy-filtered images and local electron spectra at the outermost surface layer of silicon oxide on Si(100)
作者:
Susumu Yamamoto,
Shigeru Masuda,
Hideyuki Yasufuku,
Nobuo Ueno,
Yoshiya Harada,
Takeo Ichinokawa,
Makoto Kato,
Yuji Sakai,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 6
页码: 2954-2960
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366130
出版商: AIP
数据来源: AIP
摘要:
We have observed images and local electron spectra of an oxide pattern on Si(100) using metastable electron emission microscopy (MEEM) recently developed at our laboratory. Low-energy electron microscopy (LEEM) was also used. For both MEEM and LEEM, the energy-filtered images were obtained for the first time. It was shown that MEEM gives the information on the outermost surface layer selectively, while LEEM provides averaged information on several surface layers. The intensity of the band in the local electron spectrum of MEEM can be related to the distribution of the relevant orbitals exposed outside the surface, with which metastable atoms interact effectively. Thus, using energy-filtered MEEM, we can observe the map reflecting the distribution of individual orbitals at the outermost surface layer. ©1997 American Institute of Physics.
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