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Study of ion-bombardment-induced surface topography of silver by stereophotogrammetric method

 

作者: I.M. Fayazov,   V.N. Sokolov,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1992)
卷期: Volume 124, issue 2  

页码: 181-186

 

ISSN:1042-0150

 

年代: 1992

 

DOI:10.1080/10420159208220188

 

出版商: Taylor & Francis Group

 

关键词: ion bombardment;surface topography;stereoscopic SEM;sputtering

 

数据来源: Taylor

 

摘要:

The ion-bombardment-induced surface topography of polycrystalline silver was studied using the stereo-photogrammetric method. The samples were irradiated with 30keV argon ions at fairly high fluences (> 1017ions/cm2). The influence of the inclination angle of the sample in the SEM on the cone shape of a SEM-picture is discussed. To analyse the irradiated surfaces covered with cones, the SEM-stereotechnique is proposed. The measurements of the sample section perpendicular to the incidence plane are also carried out.

 

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