A thin film pyroelectric detector
作者:
A. Bell,
Y. Huang,
O. Paul,
Y. Nemirovsky,
N. Setter,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1995)
卷期:
Volume 6,
issue 1-4
页码: 231-240
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508019367
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A dual element, point, infra-red detector is being developed from a solgel deposited PbTiO3thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes to reduce the thermal conduction from the sensor elements are created in the underlying substrate by anisotropic etching of the silicon. The measured voltage responsivity (Rv) as a function of radiation modulation frequency is compared to theoretical predictions and to conventional pyroelectric detector characteristics. Optimisation of the performance with respect to the device design is discussed.
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