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A thin film pyroelectric detector

 

作者: A. Bell,   Y. Huang,   O. Paul,   Y. Nemirovsky,   N. Setter,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1995)
卷期: Volume 6, issue 1-4  

页码: 231-240

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508019367

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A dual element, point, infra-red detector is being developed from a solgel deposited PbTiO3thin-film on a micro-machined silicon substrate. Patterning of the ferroelectric film and the electrodes is accomplished by photolithographic techniques. Membranes to reduce the thermal conduction from the sensor elements are created in the underlying substrate by anisotropic etching of the silicon. The measured voltage responsivity (Rv) as a function of radiation modulation frequency is compared to theoretical predictions and to conventional pyroelectric detector characteristics. Optimisation of the performance with respect to the device design is discussed.

 

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