Transmission electron microscopy investigation of the morphology of InP Stranski–Krastanow islands grown by metalorganic chemical vapor deposition
作者:
K. Georgsson,
N. Carlsson,
L. Samuelson,
W. Seifert,
L. R. Wallenberg,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 20
页码: 2981-2982
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114832
出版商: AIP
数据来源: AIP
摘要:
We have used transmission electron microscopy to determine the morphology of InP Stranski–Krastanow islands in GaInP, grown by metalorganic chemical vapor deposition at 580 °C. We investigated both capped and uncapped islands. It was found that the fully developed islands have the principal shape of truncated pyramids with a hexagonal base both before and after overgrowth. The planes defining the islands are of {001}, {110}, and {111} types. The base dimensions are 40–50 nm and 55–65 nm in the [1¯10] and [110] directions, respectively, and the height is 12–18 nm. ©1995 American Institute of Physics.
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