The MEMS Loop Heat Pipe Based on Coherent Porous Silicon — The Modified System Test Structure
作者:
Debra Cytrynowicz,
Praveen Medis,
Srinivas Parimi,
Ahmed Shuja,
H. Thurman Henderson,
Frank M. Gerner,
期刊:
AIP Conference Proceedings
(AIP Available online 1904)
卷期:
Volume 699,
issue 1
页码: 164-173
ISSN:0094-243X
年代: 1904
DOI:10.1063/1.1649571
出版商: AIP
数据来源: AIP
摘要:
The previous papers presented at STAIF 2002 and STAIF 2003 discussed the design, fabrication and characterization of the evaporator section and the initial test cell of a planar MEMS loop heat pipe based upon coherent porous silicon or “CPS” technology. The potentially revolutionary advantage of CPS technology is that it is planar and allows for pores or capillaries of absolutely uniform diameter. Coherent porous silicon can be mass‐produced by various MEMS fabrication techniques. The preliminary experiments made with the original test structure exhibited the desired temperature and pressure differences, but these differences were extremely small and oscillatory. This paper describes modifications made to the initial test cell design, which were intended to improve its evacuated, closed loop performance. Included among these changes were the redesign of the compensation chamber and condenser, an increase in the porosity of the coherent porous silicon wick, the fabrication of silicon top “hot” plates with an increased depth of the vapor reservoir and the integration of metal resistive heater elements onto the backside of the top plates to simulate the input heat. Some changes were made in the test sequence to produce more discernable differences in temperatures and pressures. The most recent results of the tests made with the modified system will be presented. © 2004 American Institute of Physics
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