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A Batch Fabricated SECM‐AFM Probe

 

作者: P. S. Dobson,   J. V. Macpherson,   M. Holder,   J. M. R. Weaver,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1903）
卷期: Volume 696, issue 1  

页码: 279-284

 

ISSN:0094-243X

 

年代: 1903

 

DOI:10.1063/1.1639707

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A scheme for the fabrication of combined Scanning Electrochemical Microscopy — Atomic Force Microscopy (SECM‐AFM) probes is presented for both silicon nitride and silicon cantilevers. The advantages over exsisting methods used for their production is explained. The process flow is described and initial results from electrodeposition of silver are presented. © 2003 American Institute of Physics

 

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