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Experimental apparatus for determining charge exchange between hydrogen and hydrocarbon groups in the hot filament deposition of diamond

 

作者: R. I. Cherry,   T. Whitmore,  

 

期刊: Applied Physics Letters  （AIP Available online 1995）
卷期: Volume 67, issue 20  

页码: 3040-3042

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.115447

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The charge balance in the hot filament method of depositing diamond is explored using a novel experimental arrangement. A correlation between ion activity and the growth of diamond is drawn. ©1995 American Institute of Physics.

 

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