Thin films of YBa2Cu3O7−&dgr;were sequentially grown on both sides of 3 in. diameter LaAlO3substrates by a single‐source MOCVD technique to facilitate the fabrication of double‐sided high temperature superconductor microwave devices. YBCO films on both sides of the LaAlO3substrates had thicknesses greater than 4000 A˚,Tc’s of 87–88.5 K, and microwave surface resistances as low as 23 m&OHgr; at 94 GHz and 77 K (scaling to 260 &mgr;&OHgr; at 10 GHz). It was found that the substrate temperature, brought to the desired value by radiant heating, played a critical role in the deposition of very low surface resistance YBCO films. Microwave bandpass filters with a 19‐pole forward coupled configuration were fabricated from these films. The filters showed excellent performance with dissipation losses as low as 0.5 dB. ©1995 American Institute of Physics.