Optical system for a low‐energy focused ion beam
作者:
R. Aihara,
H. Kasahara,
H. Sawaragi,
M. H. Shearer,
W. B. Thompson,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 1
页码: 79-82
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584699
出版商: American Vacuum Society
关键词: BEAM OPTICS;FOCUSING;ION BEAMS;ABERRATIONS;CRYSTAL DOPING;ELECTRODES
数据来源: AIP
摘要:
A low‐energy focused ion beam (FIB) would be a very useful tool for shallow doping with low damage density to the substrate. For a low‐energy FIB, an optical system using a retarding field is advantageous because of a low chromatic aberration coefficient which could not be reduced with a conventional column. Some evaluations were made for an optical column with a retarding electrode for practical use. The secondary electron trajectories within the equipotential space were calculated by the surface‐charge method, and some secondary‐electron images were observed with an experimental column having a retarding electrode.
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