Microfabrication by ion milling: The lathe technique
作者:
Michael J. Vasile,
Christopher Biddick,
Stephanie A. Schwalm,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 4
页码: 2388-2393
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587769
出版商: American Vacuum Society
关键词: ION BEAMS;USES;SHAPE;DIMENSIONS;SPUTTERING;SPATIAL RESOLUTION;STM;MILLING;GALLIUM IONS;KEV RANGE 10−100
数据来源: AIP
摘要:
Several novel and unusual microstructures were made by focused ion beam milling. These microstructures include needles, hooks, forks, and similar shapes resulting from 360° access afforded to the ion beam by a rotation mounting device. The lengths of the microstructures are in the 10 μm range, and the thicknesses all in the 1–2 μm range. Similar procedures were used to make prototype stylus geometries for scanning probe microscopy applications. Resolution limits to the fabrication process come mainly from the grain structure of the material being sputtered. The ion beam is 0.3 μm in diameter, and 0.08 μm pixel resolution for ion beam location was used to generate the objects. Start‐to‐finish fabrication time for most of the objects made was ∼2 h without any effort to streamline the process.
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