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Microfabrication by ion milling: The lathe technique

 

作者: Michael J. Vasile,   Christopher Biddick,   Stephanie A. Schwalm,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1994)
卷期: Volume 12, issue 4  

页码: 2388-2393

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587769

 

出版商: American Vacuum Society

 

关键词: ION BEAMS;USES;SHAPE;DIMENSIONS;SPUTTERING;SPATIAL RESOLUTION;STM;MILLING;GALLIUM IONS;KEV RANGE 10−100

 

数据来源: AIP

 

摘要:

Several novel and unusual microstructures were made by focused ion beam milling. These microstructures include needles, hooks, forks, and similar shapes resulting from 360° access afforded to the ion beam by a rotation mounting device. The lengths of the microstructures are in the 10 μm range, and the thicknesses all in the 1–2 μm range. Similar procedures were used to make prototype stylus geometries for scanning probe microscopy applications. Resolution limits to the fabrication process come mainly from the grain structure of the material being sputtered. The ion beam is 0.3 μm in diameter, and 0.08 μm pixel resolution for ion beam location was used to generate the objects. Start‐to‐finish fabrication time for most of the objects made was ∼2 h without any effort to streamline the process.

 

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