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Gallium desorption from GaAs and (Al,Ga)As during molecular beam epitaxy growth at high temperatures

 

作者: E. M. Gibson,   C. T. Foxon,   J. Zhang,   B. A. Joyce,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 12  

页码: 1203-1205

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.103485

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Direct measurements of the desorption rate of gallium from GaAs and (Al,Ga)As during growth by molecular beam epitaxy at high temperatures have been made by modulated beam mass spectrometry. The activation energy for desorption is dependent upon the nature of the site from which the gallium is lost. From free gallium atoms not incorporated into the lattice, behavior similar to that encountered under equilibrium conditions for gallium over gallium or gallium over GaAs is observed. For gallium lost from the GaAs lattice the apparent activation energy is higher and is influenced by the arsenic flux reaching the surface.

 

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