Repair of transparent defects on photomasks by laser‐induced metal deposition from an aqueous solution
作者:
Jan W. M. Jacobs,
Chris J. C. M. Nillesen,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1990)
卷期:
Volume 8,
issue 4
页码: 635-642
ISSN:0734-211X
年代: 1990
DOI:10.1116/1.584988
出版商: American Vacuum Society
关键词: AQUEOUS SOLUTIONS;MASKING;LITHOGRAPHY;LASER RADIATION;DEFECTS;TITANIUM OXIDES;CHEMICAL VAPOR DEPOSITION;TiO2
数据来源: AIP
摘要:
This paper describes a newly developed technique for repairing transparent defects on photomasks. After the uniform application of a thin transparent TiO2film on the entire mask, a noble metal is photodeposited locally on the mask from an aqueous plating solution. The rate of photodeposition, and thereby, the structure and adherence of the deposited metal, depend on the preparation conditions of the TiO2film, the composition of the plating solution and the incident light flux. These parameters can be selected in such a way that opaque metal metal pads can be deposited in sufficiently short illumination times (∼5 s). By means of laser projection through a variable rectangular aperture, it is possible to deposit rectangular metal pads with micron‐sized dimensions and sharp edges and corners in a controlled and reproducible way. Since deposition is induced photochemically, thermal broadening of the deposit does not occur. It is shown that the repair process meets the requirements with respect to spot definition, photolithography, mask cleaning, and laser trimming.
点击下载:
PDF
(975KB)
返 回