Cone Formation on Metal Targets during Sputtering
作者:
G. K. Wehner,
D. J. Hajicek,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1971)
卷期:
Volume 8,
issue 1
页码: 22-22
ISSN:0022-5355
年代: 1971
DOI:10.1116/1.1316290
出版商: American Vacuum Society
数据来源: AIP
摘要:
When a Cu surface is sputtered by ion bombardment under the condition that Mo atoms arrive at the Cu surface during sputtering an unexpected phenomenon can arise: the surface of the Cu target becomes covered with microscopic cones. The cone density increases with increasing flux density of arriving Mo atoms. When the cones are closely spaced they give the target a velvet-like black appearance. The result of dense cone coverage are a lower sputtering yield and a more oblique ejection of sputtered material. The cone tops seem to consist of Mo nuclei which are constantly replenished via surface migration and protect the underlying Cu from being sputtered.
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