首页   按字顺浏览 期刊浏览 卷期浏览 Characterization of the Si/GaAs(110) interface by soft x‐ray surface x‐ray absorption f...
Characterization of the Si/GaAs(110) interface by soft x‐ray surface x‐ray absorption fine structure

 

作者: M. L. Hasnaoui,   A. M. Flank,   R. Delaunay,   P. Lagarde,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1995)
卷期: Volume 13, issue 1  

页码: 69-76

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.587988

 

出版商: American Vacuum Society

 

关键词: SILICON;GALLIUM ARSENIDES;INTERFACE STRUCTURE;MONOLAYERS;ELECTRON BEAM EVAPORATION;AMBIENT TEMPERATURE;EXAFS;SHORT−RANGE ORDER;Si;GaAs

 

数据来源: AIP

 

摘要:

Surface x‐ray absorption fine structure experiments have been carried out on the system Si/GaAs(110) at coverages ranging from 0.8 to around 2 monolayers (ML) and at room temperature. Polarized experiments have allowed us to propose a model for the silicon adsorption site that has the initial silicon atoms sitting just above the middle of the As–As and Ga–Ga bond along the [001] direction. Above one monolayer, silicon atoms begin to be ordered with a siliconlike structure. At thicker coverages (above 3 ML) the silicon layer is amorphous, which permits a determination of the thickness probed by x‐ray absorption using the total electron yield technique.

 

点击下载:  PDF (188KB)



返 回