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Epitaxial grain growth in thin metal films

 

作者: C. V. Thompson,   J. Floro,   Henry I. Smith,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 9  

页码: 4099-4104

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.344969

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Epitaxial alignment has been obtained by means of grain growth in polycrystalline films deposited on single‐crystal substrates. A theory for epitaxial grain growth is outlined and results given for experiments on Au, Al, Cu, and Ag films on vacuum‐cleaved NaCl, KBr, KCl, or mica. Epitaxial grain growth provides a fundamentally different alternative to conventional epitaxy, and can lead to very thin films with improved continuity and crystalline perfection, as well as non‐lattice‐matched orientations.

 

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