Epitaxial grain growth in thin metal films
作者:
C. V. Thompson,
J. Floro,
Henry I. Smith,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 9
页码: 4099-4104
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.344969
出版商: AIP
数据来源: AIP
摘要:
Epitaxial alignment has been obtained by means of grain growth in polycrystalline films deposited on single‐crystal substrates. A theory for epitaxial grain growth is outlined and results given for experiments on Au, Al, Cu, and Ag films on vacuum‐cleaved NaCl, KBr, KCl, or mica. Epitaxial grain growth provides a fundamentally different alternative to conventional epitaxy, and can lead to very thin films with improved continuity and crystalline perfection, as well as non‐lattice‐matched orientations.
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