Processing and Microstructural Development ofIn SituTiN‐Reinforced Silicon Nitride/Silicon Oxynitride Composites
作者:
Wai Lin,
Jenn‐Ming Yang,
Su‐Jen Ting,
Andre Ezis,
C. James Shih,
期刊:
Journal of the American Ceramic Society
(WILEY Available online 1992)
卷期:
Volume 75,
issue 11
页码: 2945-2952
ISSN:0002-7820
年代: 1992
DOI:10.1111/j.1151-2916.1992.tb04369.x
出版商: Blackwell Publishing Ltd
数据来源: WILEY
摘要:
The development of a novel TiN‐reinforced silicon nitride/silicon oxynitride composite using an innovativein situTiN‐forming technique was investigated. Silicon powder compacts containing various amounts of TiO2(anatase structure) and sintering additives were nitrided under N2atmosphere and then further densified by hot pressing. The microstructure of the resultant composite was analyzed by X‐ray diffraction, scanning electron microscopy, and solid‐state nuclear magnetic resonance spectroscopy. The results of this study show that TiO2can be successfully converted to TiN during the nitridation of Si + TiO2mixture. The TiO2content affects not only the microstructure of the matrix but also the composition of the intergranular phase. The type and amount of sintering additives also show a significant effect on the microstructural development of the co
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