Ion cluster emission and deposition from liquid gold ion sources
作者:
C. D’Cruz,
K. Pourrezaei,
A. Wagner,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 58,
issue 7
页码: 2724-2730
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.336300
出版商: AIP
数据来源: AIP
摘要:
The emission and deposition of molten gold droplets from needle‐tip liquid metal ion sources was investigated. The Taylor cone was identified as the source of droplet emission. An upper limit of 8 &mgr;m for the virtual source size was measured. Gold films were deposited on silicon substrates. The deposited gold spots showed a peaked, axially symmetric, distribution with a half angle for droplet emission of ∼2° which was considerably smaller than the ion emission angle of ∼45°. Typical deposition fluxes were ∼5×105&mgr;m3/s/sr with total deposition rates of ∼3×103&mgr;m3/s and on an average droplet diameter of ∼1 &mgr;m at an emission current of 150 &mgr;A. Smaller diameter droplets are produced with decreasing emission current and angle. Gold films with a fine textured morphology suitable for submicron patterning were obtained at emission currents less than ∼135 &mgr;A.
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