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Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation

 

作者: G. Tas,   J. J. Loomis,   H. J. Maris,   A. A. Bailes,   L. E. Seiberling,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 18  

页码: 2235-2237

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.121276

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report on experiments in which picosecond ultrasonic techniques are used to investigate the modification of interfacial bonding that results from ion implantation. The bonding is studied through measurements of the acoustic reflection coefficient at the interface. This method is nondestructive and can be used to create a map of the variation of the bonding over the area of the interface. ©1998 American Institute of Physics.

 

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