Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation
作者:
G. Tas,
J. J. Loomis,
H. J. Maris,
A. A. Bailes,
L. E. Seiberling,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 18
页码: 2235-2237
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121276
出版商: AIP
数据来源: AIP
摘要:
We report on experiments in which picosecond ultrasonic techniques are used to investigate the modification of interfacial bonding that results from ion implantation. The bonding is studied through measurements of the acoustic reflection coefficient at the interface. This method is nondestructive and can be used to create a map of the variation of the bonding over the area of the interface. ©1998 American Institute of Physics.
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