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Monolithic integration of multiple wavelength vertical‐cavity surface‐emitting lasers by mask molecular beam epitaxy

 

作者: Hideaki Saito,   Ichiro Ogura,   Yoshimasa Sugimoto,   Kenichi Kasahara,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 19  

页码: 2466-2468

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113997

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Mask molecular beam epitaxy has been used to monolithically integrate vertical‐cavity surface‐emitting lasers (VCSELs) emitting at two wavelengths. This technique allows successive selective and nonselective growth in a chamber by using a movable mask. Varying the cavity thickness at selected areas enables the growth of VCSELs spaced 500 &mgr;m apart and emitting at wavelengths 10 nm apart. Both lasers have threshold current densities of 1.3–1.4 kA/cm2, a range comparable to that of typical VCSELs grown by conventional molecular beam epitaxy. ©1995 American Institute of Physics.

 

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