Monolithic integration of multiple wavelength vertical‐cavity surface‐emitting lasers by mask molecular beam epitaxy
作者:
Hideaki Saito,
Ichiro Ogura,
Yoshimasa Sugimoto,
Kenichi Kasahara,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 19
页码: 2466-2468
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113997
出版商: AIP
数据来源: AIP
摘要:
Mask molecular beam epitaxy has been used to monolithically integrate vertical‐cavity surface‐emitting lasers (VCSELs) emitting at two wavelengths. This technique allows successive selective and nonselective growth in a chamber by using a movable mask. Varying the cavity thickness at selected areas enables the growth of VCSELs spaced 500 &mgr;m apart and emitting at wavelengths 10 nm apart. Both lasers have threshold current densities of 1.3–1.4 kA/cm2, a range comparable to that of typical VCSELs grown by conventional molecular beam epitaxy. ©1995 American Institute of Physics.
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