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The electrical resistance of Cr films

 

作者: J. A. J. Lourens,   S. Arajs,   H. F. Helbig,   L. Cheriet,   El‐Sayed A. Mehanna,  

 

期刊: Journal of Applied Physics  (AIP Available online 1988)
卷期: Volume 63, issue 8  

页码: 4282-4284

 

ISSN:0021-8979

 

年代: 1988

 

DOI:10.1063/1.340203

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Measurements of the thickness dependence of the electrical resistance of two very thin Cr films deposited at substrate temperatures of 385 and 360 °C and pressures of 4×10−7and 10−6Torr are reported. Preliminary measurements of the thickness dependence of the Ne´el temperature (TN) of the film deposited at 360 °C at thicknesses ≥10 nm are also presented. In these two films the resistance in the thickness region 2≤d≤7.5 nm can be very well described byR∝[(d/dc)−1]−twithdcequal to 1.64±0.20 and 1.03±0.20 nm, respectively, andt=1.34±0.11. The Ne´el temperatures show a turning point around 14 nm in agreement with the known thickness dependence of the stress.dTN/dSthas been found to be ∼100 K/kbar whereStis the internal tensile stress in the film.

 

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