The electrical resistance of Cr films
作者:
J. A. J. Lourens,
S. Arajs,
H. F. Helbig,
L. Cheriet,
El‐Sayed A. Mehanna,
期刊:
Journal of Applied Physics
(AIP Available online 1988)
卷期:
Volume 63,
issue 8
页码: 4282-4284
ISSN:0021-8979
年代: 1988
DOI:10.1063/1.340203
出版商: AIP
数据来源: AIP
摘要:
Measurements of the thickness dependence of the electrical resistance of two very thin Cr films deposited at substrate temperatures of 385 and 360 °C and pressures of 4×10−7and 10−6Torr are reported. Preliminary measurements of the thickness dependence of the Ne´el temperature (TN) of the film deposited at 360 °C at thicknesses ≥10 nm are also presented. In these two films the resistance in the thickness region 2≤d≤7.5 nm can be very well described byR∝[(d/dc)−1]−twithdcequal to 1.64±0.20 and 1.03±0.20 nm, respectively, andt=1.34±0.11. The Ne´el temperatures show a turning point around 14 nm in agreement with the known thickness dependence of the stress.dTN/dSthas been found to be ∼100 K/kbar whereStis the internal tensile stress in the film.
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