The columnar growth angle in obliquely evaporated Thin films
作者:
J. Krug,
期刊:
Materialwissenschaft und Werkstofftechnik
(WILEY Available online 1995)
卷期:
Volume 26,
issue 1
页码: 22-26
ISSN:0933-5137
年代: 1995
DOI:10.1002/mawe.19950260107
出版商: WILEY‐VCH Verlag GmbH
数据来源: WILEY
摘要:
AbstractVapor‐deposited thin films grown under conditions of oblique incidence commonly develop a microstructure of columns, inclined at an angle β relative to the substrate normal, which differs from the angle of incidence α. Here it is shown that the functional relation β(α) is universally linked to the dependence of the film density ρ on the angle of incidence, through the equation tan β=tan α + ρ−1(dρ/dα). The theory is supported by an analysis of published numerical data obtained from simulations of ballistic deposition of disk
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