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A modified ionization gauge for measurement of relatively high pressures

 

作者: Rudolf G. Suchannek,   J. Roger Sheridan,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1974)
卷期: Volume 45, issue 1  

页码: 19-21

 

ISSN:0034-6748

 

年代: 1974

 

DOI:10.1063/1.1686439

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Distortions of pressure measurements with a Bayard‐Alpert gauge in the range 10−4−10−3Torr were investigated, and changes in gauge sensitivity were found to be correlated with the observation of different electric charges on the glass envelope. A modified Bayard‐Alpert gauge was designed. The gauge incorporated a screen grid between the gauge elements and the glass envelope. The screen grid was connected to the gauge filament and was intended to reduce the impact energy of electrons on the glass surface and the interaction of electric charges on the envelope with charged particles in the gauge. Four modified gauges were built and tested, and the comparison of the gauges with a McLeod gauge showed that the ion‐collector current was a linear function of gas pressure over the range from 5 × 10−5to 7.2 × 10−4Torr. For further improvements, a beam type ionization gauge is proposed.

 

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