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Scanning force microscopy using a simple low‐noise interferometer

 

作者: A. J. den Boef,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 5  

页码: 439-441

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101891

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A force microscope is described that can be used for high‐resolution surface profiling and for observing magnetic domains. The microscope uses a Michelson interferometer to sense the vibration of a cantilever. The interferometer contains some straightforward processing to eliminate laser intensity noise. Some measuring results are presented that illustrate the performance of the microscope.

 

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