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Magnetic field gradient effects on ion energy for electron cyclotron resonance microwave plasma stream

 

作者: Morito Matsuoka,   Ken’ichi Ono,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1988）
卷期: Volume 6, issue 1  

页码: 25-29

 

ISSN:0734-2101

 

年代: 1988

 

DOI:10.1116/1.574990

 

出版商: American Vacuum Society

 

关键词: ELECTRON CYCLOTRON−RESONANCE;PLASMA;PLASMA DENSITY;MAGNETIC FIELD EFFECTS;MAGNETIC MIRRORS;THIN FILMS;ENERGY SPECTRA;PLASMA FLOW;MICROWAVE RADIATION;PLASMA GUNS

 

数据来源: AIP

 

摘要:

The effects of mirror field application on ion energy and its dispersion for electron cyclotron resonance (ECR) microwave plasma stream are discussed. Low‐energy ions with minimal dispersion are extracted from ECR microwave plasma in the mirror field. Mirror field effects on the ion energy profile are caused by a decrease in plasma microparameter distribution, including plasma potential, electron temperature, and plasma density. A highly dense ion stream is extracted from ECR plasma with the mirror field.

 

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