We have found that NdBa2Cu3Ox(NBCO) thin films, fabricated by the laser ablation process, have highly stable and smooth surfaces. Clear spiral patterns with 4–5 terraces are observed all over the film area with an atomic force microscope (AFM) operating in air. We have also obtained atomically resolved image of the spiral terraces using AFM, and also using ultrahigh vacuum scanning tunneling microscope. This study suggests that NBCO film is a good candidate for device applications. ©1995 American Institute of Physics.