Energy distributions (ED) of singly and doubly charged monatomic ion species (M+and M++) emitted from a Au–Si–Be liquid metal (LM) ion source were measured by using a sector magnet. The energy spreads of Si+and Si++decrease with an increase in the inclined emitter tip angle of 0°–20°. The drastic decrease in the Si+energy spread results from a disappearance of a shoulder on the low energy side accompanying the main peak in the profile. The reason for the disappearance of the shoulder may be that the energy deficit of field ionized ions decreases and merges in the main peak because of a weaker electric field strength on the off‐angle position. At the same time, a tail in the low energy region which is produced by charge transfer (CT) collision with doubly charged ions and neutral atoms also disappears with increasing the inclined angle, although the intensity of M++does not decrease seriously. This may be due to the difference in ion trajectories for both species caused by the difference in an initial velocity at the location where the CT collision takes place. Based on the drastic decrease in the energy spread, the figure of merit in the focused beam is also discussed.