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Study of photoluminescence in nanocrystalline silicon/amorphous silicon multilayers

 

作者: Song Tong,   Xiang‐na Liu,   Xi‐mao Bao,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 4  

页码: 469-471

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114059

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report in this letter the observation of visible photoluminescence (PL) at room temperature from hydrogenated nanocrystalline silicon (nc‐Si:H)/amorphous silicon (a‐Si:H) multilayers (MLs) prepared in a plasma enhanced chemical vapor deposition system without any postprocessing. The PL peak wavelength can be controlled, blueshifting from 750 to 708 nm, through reducing the width of thenc‐Si:H sublayers from 4.0 to 2.1 nm. Quantum size effect innc‐Si:H sublayers of the ML is responsible for the emission above the band gap of bulk crystal Si. ©1995 American Institute of Physics.

 

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