Study of photoluminescence in nanocrystalline silicon/amorphous silicon multilayers
作者:
Song Tong,
Xiang‐na Liu,
Xi‐mao Bao,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 4
页码: 469-471
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.114059
出版商: AIP
数据来源: AIP
摘要:
We report in this letter the observation of visible photoluminescence (PL) at room temperature from hydrogenated nanocrystalline silicon (nc‐Si:H)/amorphous silicon (a‐Si:H) multilayers (MLs) prepared in a plasma enhanced chemical vapor deposition system without any postprocessing. The PL peak wavelength can be controlled, blueshifting from 750 to 708 nm, through reducing the width of thenc‐Si:H sublayers from 4.0 to 2.1 nm. Quantum size effect innc‐Si:H sublayers of the ML is responsible for the emission above the band gap of bulk crystal Si. ©1995 American Institute of Physics.
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