A two-dimensional capacitive position transducer with rotation output
作者:
M. J. Barker,
M. S. Colclough,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 8
页码: 3238-3240
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1148273
出版商: AIP
数据来源: AIP
摘要:
A two-dimensional capacitive position transducer is described which hasx,yand angular outputs and a fixed zero. The prototype has submicron and arcsecond sensitivity, 10 mm range, and a nonlinearity of 0.1&percent;, which is easily corrected to 0.01&percent;. The transducer employs a synthetic dual full-bridge technique and is compact, easily fabricated, and suitable for use in cryogenic environments.©1997 American Institute of Physics.
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