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A two-dimensional capacitive position transducer with rotation output

 

作者: M. J. Barker,   M. S. Colclough,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1997)
卷期: Volume 68, issue 8  

页码: 3238-3240

 

ISSN:0034-6748

 

年代: 1997

 

DOI:10.1063/1.1148273

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A two-dimensional capacitive position transducer is described which hasx,yand angular outputs and a fixed zero. The prototype has submicron and arcsecond sensitivity, 10 mm range, and a nonlinearity of 0.1&percent;, which is easily corrected to 0.01&percent;. The transducer employs a synthetic dual full-bridge technique and is compact, easily fabricated, and suitable for use in cryogenic environments.©1997 American Institute of Physics.

 

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