Nonlinear effects in heavy‐ion sputtering
作者:
H. H. Andersen,
H. L. Bay,
期刊:
Journal of Applied Physics
(AIP Available online 1974)
卷期:
Volume 45,
issue 2
页码: 953-954
ISSN:0021-8979
年代: 1974
DOI:10.1063/1.1663348
出版商: AIP
数据来源: AIP
摘要:
To test the suggestion that an enhancement of sputtering occurs in very dense collision cascades, the sputtering yieldper atomwas compared for atomic and molecular ions. In all cases tested, the yieldper atomwas higher for the molecular ions. This effect is the more pronounced the heavier the projectile and the target. In the molecular cases the overlapping cascades have higher energy densities than those initiated by the atomic ions; our results, therefore, support the suggestion of a sputtering enhancement in dense cascades.
点击下载:
PDF
(192KB)
返 回