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Dummy load technique for power efficiency estimation in rf discharges

 

作者: S. E. Savas,   D. E. Horne,   R. W. Sadowski,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1986)
卷期: Volume 57, issue 7  

页码: 1248-1250

 

ISSN:0034-6748

 

年代: 1986

 

DOI:10.1063/1.1138636

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have developed a simulated load technique for estimating power dissipation and effective impedance of the discharge which is useful over a wide range of driver frequencies. This is used to calculate the power delivered to the plasma and plasma current for frequencies from 0.12 to 13.56 MHz. This technique allows an efficiency calibration curve to be made for a given match circuit which can be quickly applied to any new discharge condition to give match efficiency.

 

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