首页   按字顺浏览 期刊浏览 卷期浏览 High yield, low cost Fabry–Pe´rot modulators utilizing correctable partial ...
High yield, low cost Fabry–Pe´rot modulators utilizing correctable partial antireflection coatings

 

作者: K. W. Goossen,   J. E. Cunningham,   W. Y. Jan,   J. Centanni,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 9  

页码: 1041-1043

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113567

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Reduced‐finesse asymmetric Fabry–Pe´rot modulators are presented utilizing partial antireflection coatings (PAR‐ASFP). Nonuniformity in semiconductor layer thicknesses may be corrected for by adjusting the thickness of the partial antireflection layer. Reduced thickness of the semiconductor layers is corrected for byreducingthe thickness of the PAR layer, leading to natural extensions to manufacturing. By correcting the PAR, we obtain greater than 6.7:1 contrast over an entire 2 in. wafer at a single wavelength and drive voltage of 9 V. ©1995 American Institute of Physics. 

 

点击下载:  PDF (80KB)



返 回