High yield, low cost Fabry–Pe´rot modulators utilizing correctable partial antireflection coatings
作者:
K. W. Goossen,
J. E. Cunningham,
W. Y. Jan,
J. Centanni,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 9
页码: 1041-1043
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113567
出版商: AIP
数据来源: AIP
摘要:
Reduced‐finesse asymmetric Fabry–Pe´rot modulators are presented utilizing partial antireflection coatings (PAR‐ASFP). Nonuniformity in semiconductor layer thicknesses may be corrected for by adjusting the thickness of the partial antireflection layer. Reduced thickness of the semiconductor layers is corrected for byreducingthe thickness of the PAR layer, leading to natural extensions to manufacturing. By correcting the PAR, we obtain greater than 6.7:1 contrast over an entire 2 in. wafer at a single wavelength and drive voltage of 9 V. ©1995 American Institute of Physics.
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