A design of reflection scanning near‐field optical microscope and its application to AlGaAs/GaAs heterostructures
作者:
G. Guttroff,
J. M. Keto,
C. K. Shih,
A. Anselm,
B. G. Streetman,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 68,
issue 25
页码: 3620-3622
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.115749
出版商: AIP
数据来源: AIP
摘要:
A scanning near‐field microscope design using the reflected light intensity as the feedback mechanism is described. Multiple fibers with high numerical apertures provide a high collection efficiency in a reflection geometry. The performance with regard to its response to large spatial variations has been tested by using a Si‐grating sample and with regard to variations of local indices of refraction by using GaAs/AlGaAs heterostructure samples. In addition, spatially resolved spectroscopy on GaAs/AlGaAs heterostructures has been obtained. ©1996 American Institute of Physics.
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