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A design of reflection scanning near‐field optical microscope and its application to AlGaAs/GaAs heterostructures

 

作者: G. Guttroff,   J. M. Keto,   C. K. Shih,   A. Anselm,   B. G. Streetman,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 68, issue 25  

页码: 3620-3622

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.115749

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A scanning near‐field microscope design using the reflected light intensity as the feedback mechanism is described. Multiple fibers with high numerical apertures provide a high collection efficiency in a reflection geometry. The performance with regard to its response to large spatial variations has been tested by using a Si‐grating sample and with regard to variations of local indices of refraction by using GaAs/AlGaAs heterostructure samples. In addition, spatially resolved spectroscopy on GaAs/AlGaAs heterostructures has been obtained. ©1996 American Institute of Physics.

 

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