Optimization of electrostatic deflectors
作者:
M. Szilagyi,
H. Cho,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 1
页码: 142-149
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.587972
出版商: American Vacuum Society
关键词: ELECTROSTATIC LENSES;OPTIMIZATION;SPLINE FUNCTIONS;ABERRATIONS;ELECTRODES;ELECTRIC FIELDS;SPATIAL DISTRIBUTION
数据来源: AIP
摘要:
Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or theapriorigiven multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2–3 orders of magnitude.
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