Some properties of laser‐generated plasma emission in the soft x‐ray region (0.1 keV<h&ngr;<1.5 keV) are presented. Detailed spectral distributions are reported for several kinds of materials (carbon, aluminum, titanium, copper, zinc, molybdenum, tin, tungsten, and lead). Dependence of x‐ray emission on focal size and target thickness is also studied. The experiments were carried out at a laser intensity of a few times 1012W/cm2using Nd‐doped phosphate zigzag glass slab laser (8 J/40 ns, &lgr;=1.054 &mgr;m). As an application of the laser‐generated plasma x rays, the sensitivity of FBM‐120 resist for x‐ray lithography was measured and a 0.25‐&mgr;m‐wide space mask pattern was replicated.