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The effect of heavy‐ion bombardment on the properties of harda‐C:H (i‐C) films

 

作者: J. W. Zou,   K. Schmidt,   K. Reichelt,   B. Stritzker,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1988）
卷期: Volume 6, issue 6  

页码: 3103-3104

 

ISSN:0734-2101

 

年代: 1988

 

DOI:10.1116/1.575481

 

出版商: American Vacuum Society

 

关键词: PHYSICAL RADIATION EFFECTS;CARBON;HARDNESS;MEV RANGE 01−10;NICKEL IONS;STRESSES;IMPURITIES;HYDROGEN;ION COLLISIONS;C

 

数据来源: AIP

 

摘要:

a‐C:H films with high hardness (>3500 kp/mm2) and high internal stress have been bombarded with 4‐MeV Ni+ions at several doses. Hardness, internal stress, and hydrogen content were measured as a function of Ni+dose. It was found that at doses between 3×1012and 3×1013ions/cm2the hardness decreases. At doses below 1013ions/cm2the internal stress increases above its original value. Hydrogen concentration and internal stress decrease in the ion range between 3×1013and 1015ions/cm2. For large doses the three properties reach a constant value.

 

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