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Electrochemical approaches to cleaning, reconstruction, passivation, and characterization of the HgCdTe surface

 

作者: S. Menezes,   W. V. McLevige,   E. R. Blazejewski,   W. E. Tennant,   J. P. Ziegler,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 3  

页码: 1874-1878

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585374

 

出版商: American Vacuum Society

 

关键词: (HgCd)Te

 

数据来源: AIP

 

摘要:

A novel electrochemical approach based on voltammetric studies of reactions occurring at the HgCdTe/electrolyte interface has been devised to clean and reconstruct the HgCdTe surface prior to passivation. Sequential potential steps, applied to a HgCdTe specimen immersed in an electrolyte, oxidize the surface, remove Hg and leave a thin protective CdTe layer, reconstructed from the lattice atoms. A thick CdTe dielectric can be subsequently electrodeposited on this surface. The electrochemically processed interfaces were characterized by a low (1010cm−2 V−1) density of fast interface states, negligible concentration of slow traps and unusual stability to prolonged air exposure and to 100 °C air anneal. The electrochemical technique was further developed as a surface characterization tool to assess the quality of Br2‐etched HgCdTe surfaces. Monolayers of Te remaining on Br2‐etched surfaces convert sequentially to TeO2and then to HgTeO3on air exposure.

 

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