Electrochemical approaches to cleaning, reconstruction, passivation, and characterization of the HgCdTe surface
作者:
S. Menezes,
W. V. McLevige,
E. R. Blazejewski,
W. E. Tennant,
J. P. Ziegler,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 1874-1878
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585374
出版商: American Vacuum Society
关键词: (HgCd)Te
数据来源: AIP
摘要:
A novel electrochemical approach based on voltammetric studies of reactions occurring at the HgCdTe/electrolyte interface has been devised to clean and reconstruct the HgCdTe surface prior to passivation. Sequential potential steps, applied to a HgCdTe specimen immersed in an electrolyte, oxidize the surface, remove Hg and leave a thin protective CdTe layer, reconstructed from the lattice atoms. A thick CdTe dielectric can be subsequently electrodeposited on this surface. The electrochemically processed interfaces were characterized by a low (1010cm−2 V−1) density of fast interface states, negligible concentration of slow traps and unusual stability to prolonged air exposure and to 100 °C air anneal. The electrochemical technique was further developed as a surface characterization tool to assess the quality of Br2‐etched HgCdTe surfaces. Monolayers of Te remaining on Br2‐etched surfaces convert sequentially to TeO2and then to HgTeO3on air exposure.
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