A method of mounting small samples for surface analysis

 

作者: Paul L. Gutshall,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1984）
卷期: Volume 2, issue 3  

页码: 332-332

 

ISSN:0734-211X

 

年代: 1984

 

DOI:10.1116/1.582819

 

出版商: American Vacuum Society

 

关键词: SAMPLE PREPARATION;SIMS;SURFACE ANALYSIS;ULTRAHIGH VACUUM;COPPER;SCANNING ELECTRON MICROSCOPY;INDIUM;SILICON;MICROELECTRONIC CIRCUITS

 

数据来源: AIP

 

 

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