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Plasma Polymerized Membranes for Isfet's

 

作者: G.Kampfrath And,   W. Leimbrock,  

 

期刊: Analytical Letters  （Taylor Available online 1987）
卷期: Volume 20, issue 11  

页码: 1765-1772

 

ISSN:0003-2719

 

年代: 1987

 

DOI:10.1080/00032718708082593

 

出版商: Taylor & Francis Group

 

关键词: Plasma Polymerization;Ion sensitive field effect transistor;Ion sensitive membrane

 

数据来源: Taylor

 

摘要:

A new type of membrane for ion sensitive field effect transistors (ISFET's) made by plasma polymerization has been proposed for electrode material. Tetrafluoroethylene, chlorobenzene, acetonitrile pure and doped with iodine served as monomers. Some structural features of the plasma polymer membranes are analyzed by ESCA- and IR- methods. Ion sensitivity and long term stability of the membrane are examined.

 

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