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A compact, intense, monochromatic, atmospheric pressure, extreme ultraviolet light sour...
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A compact, intense, monochromatic, atmospheric pressure, extreme ultraviolet light source
作者:
Earl E. Scime,
Matthew M. Balkey,
期刊:
Review of Scientific Instruments
(AIP Available online 1998)
卷期:
Volume 69,
issue 4
页码: 1581-1583
ISSN:0034-6748
年代: 1998
DOI:10.1063/1.1148812
出版商: AIP
数据来源: AIP
摘要:
An intense, monochromatic, extreme ultraviolet (121.6 nm) light source has been constructed for testing extreme ultraviolet light rejecting filters. The source and detection system operates at atmospheric pressure, is physically compact, and is relatively inexpensive to build. A calibrated neutral density filter with a transmission of1×10−6is used as a reference. The light source has been used to measure transmissions as small as9×10−6quickly (in less than 1 min) with negligible background levels. ©1998 American Institute of Physics.
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