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A comparative study of integrated ferroelectric polymer pyroelectric sensors

 

作者: D. Setiadi,   T.D. Binnie,   A. Armitage,   K. Benjamin,   H. Weller,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1998)
卷期: Volume 19, issue 1-4  

页码: 33-47

 

ISSN:1058-4587

 

年代: 1998

 

DOI:10.1080/10584589808012694

 

出版商: Taylor & Francis Group

 

关键词: Pyroelectric sensor;PVDF;VDF/TrFE copolymer

 

数据来源: Taylor

 

摘要:

This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a i μm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Peak responsivities of 4.5 V/W at 200 Hz and 3 V/W at 1kHz have been achieved for the pyroelectric sensors based on PVDF AND VDF/TrFE copolymer, respectively. Despite the responsivity of PVDF being slightly higher than that of the VDF/TrFE copolymer, the choice of which polymer to use will depend on the application and the preferred processing route.

 

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