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Si Epitaxial Growth by Iodide Transport Between Piled‐Up Pellets

 

作者: R. M. A. Lieth,   A. G. M. Eggels,  

 

期刊: Journal of Applied Physics  (AIP Available online 1964)
卷期: Volume 35, issue 10  

页码: 3015-3016

 

ISSN:0021-8979

 

年代: 1964

 

DOI:10.1063/1.1713147

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Vapor phase transport of Si over a short distance by means of the iodide and subsequent epitaxial growth on a Si substrate is described. Both the source and the substrate were biconcavely shaped pellets piled up in a silica ampule. The furnace was vertical and the temperature ranged from 1100°–1200°C, giving rise to a slight temperature gradient over the length of the ampule.

 

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