Diamond‐like carbon (DLC) films were deposited by laser ablation, using an ArF laser and a KrF laser. The target of laser ablation was frozen acetylene, instead of a conventional graphite. The DLC films were produced by the ArF laser between room temperature and 300 °C. The C‐H bond was missing from the films produced by the ArF laser, while it was present for the films produced by the KrF laser. It was possible to deposit particle‐free films in contrast to laser ablation of the graphite target. Experimental results suggested the importance of energetic charged species ejected from frozen acetylene. ©1996 American Institute of Physics.